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Saturation of Y2O3 movie growth price with growing Y(sBuCp)three provide time at 250 °C. The liquid yttrium ALD precursor (iPrCp)2Y(iPr-amd), which has a high vapor vapereason pressure and a development rate of 0.6 Å per cycle, has been reported.22 However, the synthetic routes for producing such heteroleptic precursors are normally sophisticated.
